KLA Tencor Micro XAM-100-HR Interferometer
Microscope
The MicroXAM -100 3D surface profilometer and optical interferometer can measure fields of view from 100 x 100 micrometers to 2.0 x 2.0 millimeters (dependent on the objective lens used). The MicroXAM 3D surface profiler and 100 optical interferometer quickly and accurately measures the 3D topography of surfaces at the nanometer level with 0.1 nm z-resolution (scan setup dependent) a z-scan range of 250 micrometers (or up to 10 mm with Z-Stitching). With the new 3D image stitching capabilities, multiple images can be stitched together to produce an extended fields of view. Objectives Available Include 10, 20, and 50X Vibration Isolation Base
| Service | Academic Rate | External Grant Rate | External Rate |
| Hourly Usage | 10.00 | 30.00 | 60.00 |
| Training | 50.00 | 100.00 | 150.00 |
| Sample | 100.00 | 100.00 | 150.00 |
| Technical | 200.00 | 200.00 | 250.00 |
Location:
Science Hall, Room 105